Yelim Song*, Fumio Kawamura*, Kiyoshi Shimamura, Naoki Ohashi, “Development of a flux-film-coated sputtering (FFC-sputtering) method for fabricating c-axis oriented AlN film”, AIP Advances. 10, 115011, Nov. 2020
Yelim Song*, Fumio Kawamura*, Kiyoshi Shimamura, Naoki Ohashi, “Development of a flux-film-coated sputtering (FFC-sputtering) method for fabricating c-axis oriented AlN film”, AIP Advances. 10, 115011, Nov. 2020